ITO Films

The main feature of tin-doped-indium oxide In2O3:Sn is the combination of electrical conductivity and optical transparency. ITO is mainly used to make transparent conductive coatings for liquid crystal displays, flat panel displays, plasma displays, touch panels, electronic ink applications, organic light-emitting diodes, solar cells, and antistatic coatings. Different deposition processes can be used to produce ITO layer. The lateral distribution of thickness and optical properties of films locally grown out of plasma flow on a base from magnetron sputtering was detected with the nanofilm spectroscopic imaging ellipsometer. Spectra of Delta and Psi were measured for regions of interest for a general inspection and a large scale investigation.

The high resolution investigation on a smaler scale was based on a spectra of Delta maps at different wave length. In the optical model the dispersion function of the ITO layer is described by a constant background refractive index and a Lorenz oscillator. The calculated optical properties were the frequency of the UV absorption line, the refractive index, the extinction and the thickness of the ITO layer.