Micropatterned Polymer Films

Sometimes lateral structures of polymer films on solid surfaces prevent a correct estimation of interesting film properties (thickness d, refractive index n). Common ellipsometric techniques give only average values of the thickness and optical constants of the entired illuminated surface region (light spot in mm² range). However, imaging ellipsometry is able to detect the lateral inhomogenities and microstructures in detail, and furthermore, to analyze them by fitting the ellipsometric

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