Principles of Nulling and Imaging Ellipsometry
- Introduction
- Polarization of light
- Nulling ellipsometry
- Optical modeling
- Imaging ellipsometry
- The focus scanner
Principles of Nulling and Imaging EllipsometryPrinciples of Brewser angle microscopy
- Introduction
- Brewster´s law
- Brewster angle microscopy
- Instrumentation
- Application
Principles of Halcyonics Active Vibration Isolation Technology
- Introduction
- Active vibration isolation (AVI)
- Active vibration control (AVC)
- Technology of halcyonics systems
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Comparison between nanofilm_ep3bam and nanofilm_ultrabam
- Introduction
- Optical system
- Mechanical properties
- Software
- Upgrade and options
Dispersion function of refractive index and extinction coefficient
- Introduction
- Cauchy function
- Cauchy-Urbach
- Sellmeier term
- Pole_UV, Pole_IR
- Lorentz oscillator
- Tauc_Lorentz, Tauc_Lorentz_Urbach, Cody_Lorentz
- Drude
- Forouhi-Bloomer
Imaging ellipsometry - Ellipsometric Accuracy of the nanofilm_ep3 series
- Accuracy, precision, repeatability & reproducibility
- Delta & psi, resolution and sensitivity
- Accuracy in film thickness or refractive index
- Precision vs. ROI size
- Precision vs. magnification
- Drift
- 4-zone vs. 1-zone nulling
- Map homogenity
- Calibration