Application Overview Halcyonics Products: Ellipsometry
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Ellipsometry
Ellipsometry is an optical technique for the investigation of the dielectric properties (complex refractive index or dielectric function) of thin films. Upon the analysis of the change of polarization of light, which is reflected off a sample, ellipsometry can yield information about layers that are thinner than the wavelength of the probing light itself, even down to a single atomic layer. The technology is non-destructive and contactless. Ellipsometry can probe the complex refractive index and film thickness.
There are two types of ellipsometer commercially available: imaging and non-imaging ellipsometer.
Imaging Ellipsometer are using a CCD camera as a detector and provide a real time contrast image of the sample. The tickness resolution of ellipsometers are in the Angstöm level. The lateral resolution on non imaging ellipsometer are downt to 30-50 microns, the lateral resolution of non imaging ellipsometers can go down to 1 micron